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MEMS CHEMORESISTIVE / CALORIMETRIC SENSORS FOR CO2 AND CH4 DETECTION

    biosensor
    Package case of sensor for individual gas detection
    CHARACTERISTICS
    ~ The MEMS sensors foe CO2(carbon dioxide) and CH4 (methan) have the operating principle based on the change in conductivity due to chemisorbtion a/o calorimetric effects of gas molecules to be detected at the sensitive layer surface.
    ~ The integrated heating element consists of a polysilicon layer underneath the active area. A temperature sensitive resistor will enable precisely temperature control. The sensor is integrated as MEMS in CMOS technology compatible by adding special micromachining processes.
    ~ Different polymeric films sensitivity gases to be analyzed ,exhibit changes of conductance in presence of small gases concentration at ppm level.
    ~ The sensitivity and stability of MEMS sensors are corresponding for applications during the measurement at room temperature of polluted air .or air noxes detection.
    ~In some cases a temperature of up to 300° could be applied for cleaning the sensitive polymer in order to reuse the sensor
    ~ The product design by using CONVENTOR with the microprocessing technologies summarized specifically for each type as below:
    Calorimetric sensor for combustible gas detection CH4 has working between 300-500°C consists of:
    ~ Integrated heater (patterned layer) on the ceramic Si3N4 membrane suspended on four bridges;
    ~ Dielectric (SiO2 or ceramic) deposited hot plate/electric isolation between heater and sensing electrode.
    ~ Al²O³ sol gel deposited
    ~ Temperature platinum sensor, interdigitated electrode
    * Chemoresistive sensor for CO2:
    ~ Integrated heater (patterned layer), SiO2 dielectric
    ~ Sensing electrode interdigitated capacitor Ti/Pt or Ti/W/Au
    ~ Gas sensitive layer SnO2, when heated react with gas molecule changes the resistance of interdigitated capacitor
    ~ The resulting heat is detected as an imbalance of the bridge in which the sensor is connected
    gassensorpackaging Packaging case for MEMS sensors integrated chips
    ADVANTAGES
    ~ Increased reproductibility
    ~ High MEMS sensors miniaturization degree
    ~ Microsystem integration in package (sensors, electrodes)
    ~ Low power consumtion, portable devices approaches
    ~ High working versatility as integrated or individual packaged sensors
    ~ Very low weight ~3g
    gassensorlayout Gas sensor layout
    APPLICATIONS
    ~ Environment protection and monitoring
    ~ Medical and health care applications
    ~ Industrial facilities and utilities networks and production plants
    ~ Chemical and biochemical technological processing
    ~ Safety and defence industry and applications
    ~ Residential and household appliances
    TECHNICAL FEATURES
    gassensortable Electric characteristics at +25ºC
    gassensorchiplayout
    BONDPADS IDENTIFICATION, CODES AND ASSIGNEMENT
    gassensorcodes MEASUREMENT DATES
    Exemple of measurement dates for sensor sensitivity working as micropelistor for methan detection gassensormeasure OUTLET SENSITIVITY CONTROL DIAGRAMME gassensorcontrol

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