Silicon piezoresistive sensor dies SmPs 801

Pressure sensing element wafer

• Based on piezoresistive effect.
• SmPs 801 silicon piezorestistive sensor dies can measure the pressure concerned on its surface.
• The back side of SmPs 801 dies is a pressure chamber, it can be sealed with glass, so to form sealed gauge pressure or absolute pressure type.
• If the sealed glass with vent, the dies are formed to gauge or differential pressure type.
• Made from supper quality silicon wafer of 4” diameter.
• SmPs 801 sensor dies are in mass production by means of Micro-Electro-Mechanical System (MEMS) Technology.
• Thank to advanced technology and quality control sensor dies SmPs 801 are coincident in mass productions and high performance.
• The dies are key sensing elements for our pressure sensors and transducers fabrication.
• SmPs 801 sensor dies can be used to measure the pressures ranging from 0,2 to 1000 bar, with the gauge (relative), or absolute pressure type(see following specifications for details).
• Posses high accuracy up of 0,25% fso (fso= full scale output).
• The output signal is Wheatstone bridge output in milivoltage.
• For excitation the bridge, constant current 1mA or constant voltage 5V will be available on request.
• The dies are probed and shipped on taps or in waffle packs.

Ordering code systems SmPs 60 - D - x - G8SmPs 60 Pressure range
Exemple 0,20=0-20kPa
x-O-x Customer specified pressure range
SmPs D Pressure types
G (gauge) relative pressure
A absolute pressure
SmPs x Die dimensions
x-=P> 60 bar= 2,45x2,45x0,4 mm
y =P< 25 bar= 2,70x3,45x0,4 mm
SmPs G8 Die finishing
G8 = 0,8 mm thickness of glass base
N = Die without glass
Solder Pad Layout and Electrical Connection